A11YE3

The A11YE3 is a three-axis capacitive MEMS accelerometer with true DC response, so it measures static acceleration, tilt and slow motion as well as vibration on X, Y and Z from a single mounting point. A variable-capacitance MEMS element with internal AC excitation and demodulation outputs a differential voltage signal proportional to acceleration on each axis, and with 2,000 mV/g sensitivity and a ±2 g range it is the most sensitive model in the family, with ±2 g and the lowest noise for the faintest static and low-frequency motion. Typical uses include civil structural and seismic-type testing, precise tilt and inclination, slow vehicle and machine motion and low-frequency testing down to DC.

The response is flat within ±5% from DC to 500 Hz, with ≤ 2% transverse sensitivity and 0.1% typical non-linearity (0.3% max), a ±4 V full-scale output and noise of 7 µg/√Hz over 0 – 100 Hz. It runs from any 6 – 30 VDC supply with low power consumption and survives 2,000 g pk shock. The laser-welded titanium-alloy 22.6 mm cube weighs 38 g, is sealed to IP68, and carries a single 5/16-32 9-pin connector for all three channels with the signal ground isolated from the housing, on an M5 stud mount (10-32 optional).

True DC response

Capacitive MEMS sensing measures from 0 Hz, so static tilt, sustained acceleration and slow motion are captured alongside vibration to 500 Hz. Resonance 1.2 kHz, transverse sensitivity ≤ 2%, non-linearity 0.1% typical.

Low-noise MEMS chip

An industry-leading capacitive DC-response MEMS chip gives 7 µg/√Hz noise over 0 – 100 Hz, with a differential ±4 V full-scale output that runs straight into a voltage-input DAQ from a 6 – 30 VDC supply at low power.

Three axes, one cube

Simultaneous X, Y and Z from a single laser-welded 22.6 mm cube titanium cube sealed to IP68, weighing 38 g, rated to 2,000 g rms vibration and 2,000 g pk shock and −55 to +125 °C. Signal ground isolated from the housing, one 5/16-32 9-pin connector and M5 stud mount at 3.0 N·m.

Key specifications